Microanalysis using secondary ion emission By Raimond Castaing and Georges Slodzian

Abstract

Secondary ion mass spectrometry (SIMS) is an analytical technique used to probe the composition of solids through the sputtering of the sample with a focussed primary ion beam and analyzing the emitted secondary ions generated under impact. These secondary ions ranging from elementals to low molecular weight organics offer precious information on the molecular composition and spatial organization within samples. Today, the combination of modern SIMS methodologies and instrumentation offers the most sensitive surface analysis approach, with elemental detection limits ranging from parts per million to parts per billion. In this month’s special feature article, we retrace the steps taken by Raimond Castaing and Georges Slodzian who in the early 1960’s developed a SIMS instrument based on a magnetic double focusing sector field mass spectrometer and using argon for the primary ion beam. This seminal work was first published in 1962, in French, in the Journal de Microscopie, which limited access to the scientific community at large. This article is now available in English and is beautifully prefaced by Georges Slodzian who revisits his steps as a young graduate student in the Castaing laboratory and discusses the scientific legacy of this article in the development of modern SIMS instrumentation.