Abstract
Compared to electron energy loss spectrometry (ELS), energy-dispersive X-ray (EDX) spectrometry at first appears inefficient for microanalysis of light elements. K-shell ionization cross sections increase rapidly at low atomic numbers, as shown in Figure 1, while the corresponding X-ray yields remain about constant. Also, the efficiency of the EDX detector decreases at low X-ray energies (Figure 2) due to X-ray absorption in its inactive outer layers and protective window. Even if the window is eliminated, these considerations clearly favor ELS for detection of small, light element masses.
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