Abstract
Theory of inner-shell excitation by fast electrons is outlined, taking into account other scattering processes (elastic scattering, valence-electron excitation) occurring within a thin specimen. It is shown that simple formulae can be used for quantitative analysis, provided that certain conditions are satisfied with regard to the orientation and thickness of the specimen and the acceptance angle and energy window of the spectrometer. Examples of microanalysis are given which illustrate potential uses of the energy-loss technique, particularly where first- and second-row elements are concerned.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
