Abstract
Theory of inner-shell excitation by fast electrons is outlined, taking into account other scattering processes (elastic scattering, valence-electron excitation) occurring within a thin specimen. It is shown that simple formulae can be used for quantitative analysis, provided that certain conditions are satisfied with regard to the orientation and thickness of the specimen and the acceptance angle and energy window of the spectrometer. Examples of microanalysis are given which illustrate potential uses of the energy-loss technique, particularly where first- and second-row elements are concerned.
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