Abstract
We report on a novel micro torsion mirror actuated by a compound electrostatic driving structure. The compound driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process. As demonstrated by experiment, the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90° rotation induced by the pull-in effect in a voltage control fashion. The continuous rotating range of the micro torsion mirror is increased to about 46° at an increased threshold voltage. The measured threshold voltage ranges of the mirrors with torsion springs of 1μm and 0.5μm in thickness are 390–410V and 140–160V, respectively. Theoretical modeling is carried out to compare with the experiment. The optical insertion loss has also been measured to be −1.98dB when the mirrors serve as digital optical switches in a 2×2 array form.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
