Micro Sensor Operating at Room Temperature

Abstract

ABSTRACTIn the study, low power micro gas sensors operated at room temperature for the detection of NH3 and NOx gases are proposed. As candidate material of gas sensor for NH3 gas detection at room temperature, polyaniline(PANi) synthesized by chemical polymerization was selected. And Te(Tellurium) thin film was used for NOx gas detection at room temperature. By using these sensing materials, micro gas sensors for room temperature operation were prepared and measured the response characteristics for NH3 and NOx.In case of PANi sensor, the structure was inverted staggered FET type having advantage of useful one for Lab-On-a-Chip. The operating principle of the sensor is based on the change in work function of PANi film caused by adsorption of gas molecules in air on the film surface. The change in work function was measured indirectly from that in gate voltage of the FET device. The responses to various gases (NH3, CH4, Methanol and CH3CN) were obtained in gate voltage step mode in R.H. 30%. And in case of Te sensor, the sensing material was thermally evaporated on glass substrate. The thickness and annealing temperature were 500 Å −2000 Å and 100 °C −300 °C, respectively. The Te-based micro gas sensor exhibited high sensitivity to NOx and good selectivity against CO and hydro-carbon gases. And by adding Ti to Te film, the sensor has a good selectivity to CO gas.