Abstract
A toroidal electrostatic analyzer was installed in a mubeam line for local backscattering analysis with high energy resolution and simultaneous detection of angular ion distributions. The secondary electron image of gold patterns on silicon could be obtained with a minimum spot size of 8 × 8 μm 2. The energy resolution of the toroidal analyzer slightly decreased with the decrease in the spot size. Changes in probe position gave rise to energy shifts of leading edges in RBS spectra.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
