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Abstract
The micro-Raman spectra of three iridium silicides, IrSi, IrSi1.75 and IrSi3, were obtained. The silicides were prepared by rapid thermal annealing of iridium films deposited on Si substrates. The three phases were identified by Rutherford backscattering spectrometry. The main bands observed in the micro-Raman spectra are described in order to provide a simple characterization method for these silicides with high spatial resolution. The three silicides present phonon bands around 165 and 200 cm−1. Some additional broad bands between 240 and 500 cm−1 were also observed. Copyright © 2002 John Wiley & Sons, Ltd.
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