Micro pressure sensor fabrication without problem of stiction for a wider range of measurement

Abstract

The paper presents a novel fabrication process for single or arrays of micro pressure sensors. The fabrication process is almost the reverse of the surface micromachining process used for the pressure sensor. This allows the use of SU-8 to form a cavity that can be much deeper for pressure measurement. Thus, the sensor can provide a much wider range of pressure measurement. The fabrication process has a complete absence of diaphragm stiction. In addition, arrays of pressure sensors can be readily made and integrated into a complicated micro system. More detailed design and fabrication techniques developed for this sensor are presented.