Micro-phase measuring profilometry: Its sensitivity analysis and phase unwrapping

Abstract

Global illumination affects shape measurement accuracy, and phase unwrapping is an important problem in phase measuring profilometry. In this paper, a micro-phase measuring profilometry is proposed to reduce the effects of global illumination. The wrapped phase error level of the proposed method is lower than that of the traditional micro-phase shifting method. First, a frequency selection rule is developed in combination with the micro-phase rule to design the frequencies of the proposed phase measuring profilometry. The frequency rule is obtained by analysing the uncertainty of the wrapped phase caused by intensity noise. Then, phase unwrapping is regarded as a congruence problem, and the closed-form robust Chinese remainder theorem algorithm is adopted to determine the correspondence. Finally, the comparative experiments are conducted on a projector-camera system. Experimental results show that the effects of global illumination can be effectively reduced with the proposed phase measuring profilometry, and the proposed frequency selection rule is valid. In addition, the performance of the robust Chinese remainder theorem in addressing the phase error is better than that of traditional Chinese remainder theorem. Furthermore, the unwrapping accuracy can nearly reach 100% if the frequency selection rule is satisfied. Otherwise, the performance degrades.