Abstract
Proton beam writing technique was recently introduced at 3MV Tandetron accelerator at Nuclear Physics Institute in Rez (Czech Republic). It has been used, to produce three-dimensional (3D) micro-structures in poly(methylmethacrylate) by 2.0MeV and 2.6MeV protons micro-beam. Micro-channels (52μm×52μm) have been realized.After chemical etching, the quality of the bottom and side walls of the produced structures in PMMA were analyzed using Scanning Transmission Ion Microscopy (STIM).
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