Micro-patterned deposition of MoS2 ultrathin-films by a controlled droplet dragging approach

Devendra Pareek,Lukas Büsing,Kathryna G Roach,Levent Gütay,Marco A Gonzalez,Jürgen Parisi,Sascha Schäfer

doi:10.1038/s41598-021-93278-6

Devendra Pareek, Lukas Büsing + Show 5 more

Open Access

https://doi.org/10.1038/s41598-021-93278-6

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Journal: Scientific Reports	Publication Date: Jul 7, 2021
Citations: 5	License type: open-access

Affiliation: Carl von Ossietzky University of Oldenburg

Abstract

Micropatterning of transition metal dichalcogenide (TMDC) ultrathin-films and monolayers has been demonstrated by various multi-step approaches. However, directly achieving a patterned growth of TMDC films is still considered to be challenging. Here, we report a solution-based approach for the synthesis of patterned MoS2 layers by dragging a precursor solution droplet with variable velocities across a substrate. Utilizing the pronounced shearing velocity dependence in a Landau-Levich deposition regime, MoS2 films with a spatially modulated thickness with alternating mono/bi- and few-layer regions are obtained after precursor annealing. Generally, the presented facile methodology allows for the direct preparation of micro-structured functional materials, extendable to other TMDC materials and even van der Waals heterostructures.

Highlights

Micropatterning of transition metal dichalcogenide (TMDC) ultrathin-films and monolayers has been demonstrated by various multi-step approaches
For integrating TMDC films into functional devices and complex nano architectures, various patterning and interfacing approaches have been developed such as focused ion beam (FIB) m illing[9], photo and electron beam lithography[10], and combinations of metal sputtering processes with selective etching after photolithographically defined masking[11]
One line of research focuses on the deposition of colloidal M oS2 flakes and was successfully employed for the preparation of nano-porous MoS2 films, which act, for example, as a catalyst for the hydrogen evolution reaction[19,20,21,22]

Summary

Introduction

Micropatterning of transition metal dichalcogenide (TMDC) ultrathin-films and monolayers has been demonstrated by various multi-step approaches. Depending on the shearing velocity v imparted by the moving substrate, the precursor droplet is deformed and leaves a thin trailing liquid film meniscus behind.

Results

Conclusion