Micro Pattern Roll Mold for Large Area Display by Electroforming and Wrapping Method

Abstract

A pattern roll mold for imprinting 15-in. liquid crystal display black matrix was fabricated. A Ni sheet mold was replicated by electroforming process. For high accurate sheet mold wrapping process, a sheet mold wrapping machine was developed. Using the roll mold, black matrix patterns were manufactured by a roll-to-roll nanoimprint lithography system with high pattern uniformity. The electroformed Ni sheet mold has 0.01% dimensional error rate due to the thermal and internal stress. The radius variation of the roll increases by 2 µm after wrapping the sheet mold. And alignment error in wrapping was 8.2×10-5 radian out of vertical line.