Abstract
This paper presents a novel hybrid CMOS/MEMS tilt sensor with a 5∘ resolution over a 300∘ range. The device uses a MEMS‐based semicircular mass suspended from a rigid body, projecting a shadow onto the CMOS‐based optical sensor surface. A one‐dimensional photodiode array arranged as a uniformly segmented ring is then used to determine the tilt angle by detecting the position of the semicircular mass. The complete sensor occupies an area of under 2.5 mm × 2.5 mm.
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