Micro-opto-electro-mechanical angular velocity transducer based on the optical tunneling effect

Abstract

The possibility of designing a micro-opto-electro-mechanical (MOEM) angular velocity transducer based on the optical tunneling effect is discussed. A MOEM transducer model has been developed. Dependences of the output optical power and output voltage on angular velocity have been obtained. The effective measurement range of angular velocities that provides quasilinearity of the transfer function has been determined. The effects of the design parameters of the sensitive element and temperature on the performance of the transducer are analyzed.