Micro/Nano Three-Dimensional Fabrication Using Fine Particles Aggregation in Elastic Resin

Abstract

A novel nano micro/nano fabrication process using functional nano particles is developped. Functional particle photsensitive resin is made by mixing functional micro and nanoparticles with photosensitive resin uniformly. Fundamental shape of micro parts are fabricated by using microstereolithography system: low temperature annealing procedure is applied to shrink the resin body of micro parts: during the annealing process, functional particles are moved and aggregated slowly in the elastic resin to inside via surface: functional particle are gathered on the surface of the micro parts. Micro 3D structure of functional particles are fabricated based on the proportional shrinkage of fundamental shape. In this report, we investigate the fabrication mechanism of 3D structures made of fine functional particles, and describe a fundamental experiment to form the micro electrode made of Ag nanoparticles.