Abstract
The stucture of tunable vertical cavity surface emitting laser is obtained based on the micro-nano-mechanical technology. The DBR reflector with Al0.8Ga0.2As sacrificial layer consisted the micro-nano reflector systerm, which combines with the multi-well active region coupled structure. In addition, the structure of micro-nano-optical machine system is not only the DBR reflector, but also serves to tune the wavelength of lasing by the electrostatic force. Good laser characteristics are obtained with continuous tuning ranges over 18.8 nm near 968.8 to 950 nm for 0—7 V tuning bias.
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