Abstract
The feasibility to develop mini- and micro-magnetic electro-mechanical systems (MEMS) has been evaluated by prototyping of a single-phase stepper motor. The main targeted application of such device is the watch industry needing micro-motors in huge quantities at low cost. The motor part that required the greatest efforts has been the magnet, which cannot yet be found in film layer. The screen-printing technology has been used for the production of NdFeB-based magnets whose properties have been characterised. The thick film magnets have been integrated in the stepper motor specially designed for this purpose. The whole motor has been characterised and conclusions are drawn on the possibility of producing thick film magnets for magnetic MEMS.
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