Abstract
Many motion-active materials have recently emerged, with new methods of integration into actuator components and systems-on-chip. Along with established microprocessors, interconnectivity capabilities and emerging powering methods, they offer a unique opportunity for the development of interactive millimeter and micrometer scale systems with combined sensing and actuating capabilities. The amplification of nanoscale material motion to a functional range is a key requirement for motion interaction and practical applications, including medical micro-robotics, micro-vehicles and micro-motion energy harvesting. Motion amplification concepts include various types of leverage, flextensional mechanisms, unimorphs, micro-walking /micro-motor systems, and structural resonance. A review of the research state-of-art and product availability shows that the available mechanisms offer a motion gain in the range of 10. The limiting factor is the aspect ratio of the moving structure that is achievable in the microscale. Flexures offer high gains because they allow the application of input displacement in the close vicinity of an effective pivotal point. They also involve simple and monolithic fabrication methods allowing combination of multiple amplification stages. Currently, commercially available motion amplifiers can provide strokes as high as 2% of their size. The combination of high-force piezoelectric stacks or unimorph beams with compliant structure optimization methods is expected to make available a new class of high-performance motion translators for microsystems.
Highlights
The continuing evolution of microelectronics since the 1950s has been the cornerstone of information technology development, enabling seamless information processing, storage and transfer
The thickness limitations of planar Si fabrication processes were addressed to a significant extent by the introduction of Micro Electro Mechanical Systems (MEMS) methods, such as thick metal electroplating, up to 100 μm, deep reac
This paper aims at reviewing and classifying the various motion amplification mechanisms that have emerged from recent research
Summary
The continuing evolution of microelectronics since the 1950s has been the cornerstone of information technology development, enabling seamless information processing, storage and transfer. While Si integration is currently available or viable for a surprisingly wide range of sensors, the implementation of integrated actuation systems is not as favorable, because actuation usually requires interaction with the macro scale, indicatively in the range of a few millimeters and above Examples of such applications include robotics, micromotors, precision positioning, displays, microfluidics and the control of optical systems. Such motion amplification mechanisms can provide an interface among nanoscale, microscale and millimeter scale systems They have enabled various technologies including XYZ precision control and micromanipulator tools for medical micro-robotics. This paper aims at reviewing and classifying the various motion amplification mechanisms that have emerged from recent research It aims at providing a simplified descriptive and quantitative analysis of the physical concepts behind the various motion amplification implementations.
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