Abstract
Micro machining of single-crystalline silicon is performed with the second-harmonic of Nd:YAG laser in this study. In experiments, various shapes of plastic microlens are fabricated on a transparent substrate by the developed die-less method. These microlenses are shaped by thermal deformation induced by the Er:YAG laser beam absorbable for the acrylate resin. And then, these lenses are used as optical devices to generate the local high energy density desired for machining of silicon in air and water. Machining characteristics are investigated in the single groove machining process, and the grid groove pattern and the herringbone pattern are formed to demonstrate the feasibility of proposed methods.
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