Abstract
The ability to simultaneously detect multiple volatile organic compounds (VOCs) is crucial for assessing indoor air quality and addressing significant health hazards. In this study, we present a sacrificial template approach for on-chip fabrication of two-dimensional (2D) Ni-doped SnO2 nanoporous sensing films on micro-heater substrates. The technical analysis shows that the resulting honeycomb-like ultrathin Ni-SnO2 sensing layer on a suspended substrate maintains perfect structural integrity and consistency. The Ni-SnO2 sensors exhibit exceptional characteristics, including a ppb-level detection limit, high sensitivity, fast response/recovery time, and signal repeatability for typical VOCs, while operating at a low power consumption of 25 mW. Additionally, the Ni-doping enhances the sensors' cross-sensitivity to various forms of VOCs, while causing a discernible response inhibition towards flammable or exhaust gases. Furthermore, X-ray photoelectron spectroscopy (XPS) and in-situ Raman spectra reveal a Ni2+-substitution induced surface adsorbed oxygen species enrichment mechanism for sensing enhancement. Thus, the developed Ni-SnO2 sensors hold promise as future candidates for reliable air quality assessment by real-time monitoring of overall concentrations of multiple VOCs.
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