Abstract
Diamond-like carbon films have been synthesized by the pulsed laser deposition under a magnetic field. The hardness of the films was increased considerably. However, due to the large compressive stress in the films, adhesion of the films became a serious problem. Two methods, i.e. laser irradiation of the silicon substrate surface and growing a composition-graded intermediate layer, were used to increase the adhesion. With the variations of the interface conditions, the change of the stress type from compressive stress to tensile stress was observed. By careful choosing the composition change of the intermediate layer, adherent diamond-like carbon films with a thickness of 1145 nm were successfully grown on silicon substrates at 80°C.
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