Abstract
A microsensor for gas-flow sensing applications with high sensitivity (700 mV at a flow velocity of 2.7 m s −1 and a supply voltage of 3 V), low power consumption (8 mW at 55 K over-temperature and an airflow velocity of 0.8 m s −1) and short response time is presented. A heat sink and flow guide integrated on the backside of the microsensor is used to modulate the temperature distribution on the diaphragm to achieve an extended measurement range. Results from device simulation, technological processing and sensor performance are discussed.
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