Abstract

We present the design and fabrication of a miniaturized array of piezoelectrically actuated high speed Fresnel mirrors with individual mirror control. These Fresnel mirrors can be used to generate propagation invariant and self-healing interference patterns. The mirrors are actuated using piezobimorph actuators, and the consequent change of the tilting angle of the mirrors changes the fringe spacing of the interference pattern generated. The array consists of four Fresnel mirrors each having an area of 2 × 2 mm2 arranged in a 2x2 configuration. The device, optimized using FEM simulations, is able to achieve maximum mirror deflections of 15 mrad, and has a resonance frequency of 28 kHz.

Highlights

  • A Fresnel mirror consists of two mirror planes inclined at a small angle to each other

  • A single Fresnel mirror consists of two mirror segments that meet at the center line of the device

  • The mirrors are attached to a silicone (PDMS) base layer, which is in turn attached to a piezoceramic disc (figure 1 (b))

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Summary

Introduction

A Fresnel mirror consists of two mirror planes inclined at a small angle to each other It generates an interference pattern in the reflected light [1] and proves the wave nature of light [2]. We demonstrate the individual tunability and study the cross-talk between the mirrors. Such an array may find application in studying discretely spatially resolved autocorrelation and in multichannel line foci for parallel material processing.

Design and Simulation
Optimization by FEM-simulation
Fabrication
Optimization of the deflection angle
Individual mirror control and cross-talk
Findings
Summary and conclusion
Full Text
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