Abstract
Micro-force measurement with high resolution, accuracy, and reliability is of interest in a broad range of applications including gravitational-wave detection, intelligent healthcare, bionic robotics, and micromanipulation. Herein, the researchand development in recent years of micro-force sensors based on various principles is reviewed thoroughly, presenting their characteristics and applications, as well as summarizing their advantages and limitations. The most indispensable component of force sensors, elastic sensitive elements, is underlined. Next, four kinds of not widely used but promising sensors are also introduced briefly. Finally, the traceable reference forces are analyzed, concluding with a future perspective into the corresponding challenges and opportunities of micro-force sensors for future research. This review aims at providing references for developing micro-force sensors and improving their performance.
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