Micro-fabricated wideband band-stop filter using GaAs-based integrated passive device technology

Abstract

This paper presents a new concept of implementing a micro-fabricated wideband band-stop filter on a gallium arsenide (GaAs) substrate using integrated passive device technology. The incorporation of an air-bridge structure was explored to enhance design flexibility and achieve excellent radio-frequency performance of the filter. A wideband band-stop filter was realized on a GaAs substrate, generating an insertion loss of − 0.37 dB and a return loss of − 38 dB with excellent attenuation of − 28.78 and − 22.27 dB, in the lower and the upper passband, respectively. The filter resonates at 10.72 GHz, occupying a die area of 2000 μm × 1540 μm. The selectivity of the filter is reflected by its tremendous suppression of out-of-band signals with the existence of attenuation poles in the vicinity of the resonance frequency. Experimental verification of the filter response demonstrates its potential use as an on-chip device operating in the X-band frequency spectrum.