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Abstract
This work was directed at the achievement of efficient extraction of all secondary electrons from the surface of the specimen, with the least possible corruption of the information which they contain. The method adopted is to use a system of microelectrodes very close to the conductor under investigation to extract the electrons and to act as a retarding-field spectrometer system. It is applicable both to conventional SEMs and those where the specimen is immersed in the magnetic field of the final lens.
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