Abstract
The article presents a comparative study regarding the design and experimental results for a miniature electromagnetic actuator with a modified design comparing with the classical type, including a mobile array of micro-magnets and a fixed coil in two configurations (planar spiral multi-layered and cylindrical). Previous work on design, modeling and simulation of this type of actuator indicated the optimum design and conducted to dimensions and material parameters. Different types of actuators were produced and experimentally tested, showing good results but also some drawbacks. Three of these design solutions are presented together with the static voltage-deflection and electrical impedances curves, experimentally derived. The results confirmed the feasibility of two actuating solution, showing good linearity and possibility to control the position at h accuracy and indicated improving directions.
Highlights
Micro-electromechanical systems are involved in many applications [1]
The article presents a comparative study regarding the design and experimental results for a miniature electromagnetic actuator with a modified design comparing with the classical type, including a mobile array of micromagnets and a fixed coil in two configurations
The electro-mechanical graph is almost linear for positive electric current and showing a small nonlinearity for negative electric currents
Summary
Micro-electromechanical systems are involved in many applications [1]. Many actuating principles were previously proposed but the highest value of the ratio between the actuating energy-volume of actuator is provided by the electromagnetic actuation, with different design solutions [2]. The electrodynamic interaction is produced between magnetic materials and electric current carrying coils and is preferred for its strength, polarity and range of displacements at micro-scale [3]. These properties recommend them for laser technology used in systems for measurements, sensors, micro-scanners, micro-mirrors with adjustable focalization and correctable aberrations, etc. The proposed design is provided with a fixed coil and a moving micro-magnets array and the actuation is achieved through the electrodynamic interaction between the permanent micro-magnets array and the electric current in the coils. A discussion regarding possible improvements and a causal analysis of the design with poor behavior is included
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
