Abstract
The micro-motion stages are critically important in modern manufacturing technology. In this paper, an integrated approach for measuring micro-displacement of micro-motion stage that incorporates micro-motion measurement algorithm into the computer microvision is proposed. At first, the basic principle of the computer microvision measurement is analyzed. Then, an algorithm for micro-motion measurement is proposed. Finally, the micro-displacement of the micro-motion stage is measured using the integrated approach. The maximal bias of this proposed combined approach reached 12.5 nm. Experimental results show that this method can measure micro-displacement with nanometer accuracy.
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