Abstract
The micro-motion stages are critically important in modern manufacturing technology. In this paper, an integrated approach for measuring micro-displacement of micro-motion stage that incorporates micro-motion measurement algorithm into the computer microvision is proposed. At first, the basic principle of the computer microvision measurement is analyzed. Then, an algorithm for micro-motion measurement is proposed. Finally, the micro-displacement of the micro-motion stage is measured using the integrated approach. The maximal bias of this proposed combined approach reached 12.5 nm. Experimental results show that this method can measure micro-displacement with nanometer accuracy.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.