Abstract
Micro-Electromechanical Systems (MEMS) have become increasingly commonplace in varied uses such as miniature pumps, motors, and sensors. As MEMS size continues to decrease, the intricacy of their construction has increased. With this increase in complexity comes a need to evaluate the assembly and functionality of these devices in a nondestructive manner. We proposed the utilization of micro-CT imaging as a method of such evaluation for MEMS devices. Computational simulations were performed in order to determine optimal source materials and imaging parameters for micro-CT scans. Multiple MEMS components of various architecture, fabricated by Sandia National Labs, were then imaged in order to verify the simulations, as well as to prove the feasibility of micro-CT imaging of such devices. The raw data from these scans was run through computational simulations to verify the best choice of filter and interpolation method when reconstructing micro-CT images. The results of the simulations, as well as the level of detail present in the three dimensional reconstructed images of various MEMS devices proved the feasibility of micro-CT as an effective tool for the evaluation of such devices.
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