Abstract
Aiming to realize novel micro mobile robots or micro conveyers, artificial micro cilium actuators in group should be developed. A pipemorph actuator which is composed of a thin needle as an internal electrode, piezoelectric thin film cylindrically surrounding the internal electrode, and external electrodes attached on the orthogonal four surfaces of the piezoelectric film is adopted as an artificial cilium and then the effective processes based on the hydrothermal method the and electrostatic flocking to fabricate the micro pipemorph actuators in group are proposed and experimentally examined. The cilium actuators in group which are fabricated by using partial nickel plating of titanium wire can convey small paper sheets or plastic sheets at the maximum speed of 1.53 µm/min.
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