Abstract
Abrasive air jet micro-machining is a new promising technology for processing brittle material. An experimental study of micro-channeling on quartz crystals using an abrasive air jet is presented. The effect of the processing parameters on the produced channel profile such as the channel width, depth and kerf taper angle is analyzed, along with the effect on the roughness of channel bottom surfaces. Plausible trends of the major process performance measures with respect to the process parameters have been revealed. These trends are useful in guiding the selection of process parameters in practice.
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