Micro-and nanoscale 3D printing

Abstract

There are great demands for complicated three-dimensional (3D) micro/nanostructures in various areas and micro-components, such as MEMS, bio-medical engineering, tissue engineering, new materials, new energy, HD display, micro fluidics, micro- and nano-optical devices and systems, micro/nano sensors, micro/nano electronics, optoelectronic device, printed electronics, etc. However, existing micro/nano manufacturing technologies cannot well meet these requirements of cost-effective mass producing 3D micro/nanostructures. High volume manufacturing complex 3D micro/nanostructures with low cost and high throughput, particularly for producing 3D micro/nanostructures with high aspect ratios and multi-materials as well as from wide range of materials, currently has been considered as the most significant challenging issues. Micro-and nanoscale 3D printing (micro/nanostructure additive manufacturing) has showed high potentials and unique strengths in creating arbitrary 3D micro/nanostructures, true micro/nanostructures with high aspect ratios, and advanced materials with micro/nanostructures as well as composite materials. It can also be considered to enhance capability of micro/nanofabrication technology in true 3D microcomponents manufacturing area. This paper provides a comprehensive review on significant results, recent progress for a large variety of 3D micro-and nano scale 3D printing processes, and performs the comparison of each process. Furthermore, typical applications and various 3D printing materials available are presented. Finally, the prospects, challenges and future trends are discussed. The paper may provide a reference and direction for the further explorations and studies of micro/nanostructure additive manufacturing both in industry and academia.