Abstract
Potential applications of micro and nano EDM in the research in micro nanotechnology and microfluidics are first discussed. Milling EDM, one variation of EDM, is proposed as a flexible tool for such applications. In practice EDM milling is a process rarely used because it is difficult to prepare thin electrode tools. Therefore the use of electrochemically etched Pt-Ir electrode tool for EDM machining is demonstrated. In addition a compact micro EDM machine is described. Preliminary results concerning the micromachining of silicon are also shown.
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