Micro and nano coordinate measuring technology with optical and tactile optical probes in high precision coordinate measuring machines

Abstract

In addition to high precision coordinate measuring machines, micro and nano coordinate measuring technology requires probes with the highest precision and the ability to measure the smallest structures. Based on the proven ultra accurate coordinate measuring machine, the VideoCheck UA, we have upgraded several of the precision relevant components. To enable precise measurements of microstructures, optical probes and tactile or tactile-optical micro probes are required. These provide 3D probing capability and high structural resolution due to high optical resolution and respectively tiny probing elements. Typical measurement tasks and results will be shown using available optical sensors implemented in precise coordinate measuring machines. Special remarks will be given to a unique, full 3D tactile-optical probing system that overcomes the limitations of all known tactile probing systems. The new assembly and the target parameters will be presented as well as the current state of development.