Abstract
Three diamensional (3D) measurement method by Scanning Electron Microscope (SEM) has already been proposed by using the principle of shadow moire. In the method, the image of original grid in shadow moire image must be clearly removed in fringe analysis process in order to perform high resolution analysis. A new method based on the principle of projection moire is proposed to solve the trouble concerning the grid. In this paper, the mechanism of producing some shadows of grid on the surface of the object by back scattering electron beam in the new method is discussed. Fringe image as shadow of grid is analyzed by Wavelet transform. The precise 3D measurement is realized by using the phenomenon of shadows of grid. Furthermore, a 3D micro structure on the head of a hard disk is measured. From the comparison of results obtained by Atomic Force Microscope (AFM), it is confirmed that the proposed method has high-resolution power(about 20nm).
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