Micorfabrication of Miniature Electrode Array along Micro Channels

Abstract

Miniature electrode together with micro channels on silicon substrate has potential application in MEMS (Micro Electromechanic System) field. The PN junction of silicon substrate gave the limitation on the formation of miniature electrode. Discussing this limitation resulted from PN junction and taking advantage of MEMS techniques, the design and fabrication of polycrystalline silicon electrode array at the both sides of micro channels on the silicon substrate was put forward. The V-I curve between the adjacent electrodes of electrode array shows that the influence of PN junction is reduced and the electrode array can provide electrical field for some separation chip, which may give a new idea to the integration design of LOC (laboratory on the chip).