Abstract
A planar optical waveguide was formed in RbTiOPO4 (RTP) crystal by 3.0-MeV He-ion implantation with a dose of 1.0×1016ions/cm2 at room temperature. The prism-coupling method was used to take dark mode measurements at 633nm. The refractive-index profile of the He-implanted RTP waveguide was analyzed with the reflectivity calculation method. The sample was annealed at 200°C for 60min in air. After annealing the intensity profile of the guide mode was obtained by end-fire coupling. The annealing process effectively removed the color centers and reduced the loss of waveguide.
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