Abstract
Scanning electron microscope images obtained on a cross-section of a sputtered multilayer structure have proven to be crucial for qualifying these films for their intended use as a multilayer Laue lens. The quality of the linear Fresnel zone structure is assessed by means of image processing and analyses, and these analyses are then used to qualify the structure for further lens processing. The image analysis as well as problematic SEM artifacts are discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
