Abstract
The metrological characterization of a Fresnel method for measuring the dimensions of objects is investigated. In this method, free space, as an optical element, transforms the input image of the inspected object into its Fresnel image with great accuracy. The major sources of systematic measurement error are estimated analytically including non-uniform illumination of the object, the interference effect of the edge images of the diffracting object, the integration properties of the linear multi-element photodetector, the influence of the extended size of a partially coherent light source and the volumetric properties of a 3D object. It is proposed that algorithms are used to account for any error components; effective algorithms for this are proposed.
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