Abstract
Test structures used for calibration of scanning probe microscopes have certain limitations. They are short-lived, their work surface becomes coated with microparticles over time, and it gradually wears out by contact with the measuring probe, resulting in the etalon geometry deformation. Dynamic etalons allow calibrating SPMs in ranges from pm to nm. In this article we present the results of dynamic etalon metrological characteristics research using an SPM equipped with tree-coordinate heterodyne laser interferometer. Obtained data indicates stability of piezoelectric modulus and absence of piezoelectric hysteresis phenomena in the etalon samples used.
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