Abstract

Spark discharges are normally associated with real-event electrostatic discharges (ESDs). The electrical characteristics of the spark channel can influence the nature of the discharge current which can cause both direct and indirect damage in semiconductor devices and electronic systems. In this paper, a method is described to determine the resistance of spark discharges. Discharge currents are measured for underdamped and forced overdamped cases; an analysis of the resulting waveforms is used to calculate the effective resistance of the discharge. The technique is applied to measure the resistance of a spark discharge between two spherical electrodes.

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