Abstract
The basic analysis methodology of micromachined accelerometer reliability are developed. The reliability of micro-accelerometer system are basically analyzed mathematically based on probability theory, indicating that the fracture strength distribution of accelerometer structure keep to Weibill distribution, and the stress distribution keep to normal distribution. Fracture reliability degree for micromachined accelerometer is defined as the probability that strength is greater than stress. From this, we can predict and evaluate various micro-accelerometer fracture reliability under shock load. The methodology of reliability is also commonly suitable for other MEMS devices.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
