Abstract

Metal oxide semiconductor (MOS) gas sensors have many advantages, but the main obstacle to their widespread use is the cross-sensitivity observed when using this type of detector to analyze gas mixtures. Thermal modulation of the heater integrated with a MOS gas sensor reduced this problem and is a promising solution for applications requiring the selective detection of volatile compounds. Nevertheless, the interpretation of the sensor output signals, which take the form of complex, unique patterns, is difficult and requires advanced signal processing techniques. The study focuses on the development of a methodology to measure and process the output signal of a thermally modulated MOS gas sensor based on a B-spline curve and artificial neural networks (ANNs), which enable the quantitative analysis of volatile components (ethanol and acetone) coexisting in mixtures. B-spline approximation applied in the first stage allowed for the extraction of relevant information from the gas sensor output voltage and reduced the size of the measurement dataset while maintaining the most vital features contained in it. Then, the determined parameters of the curve were used as the input vector for the ANN model based on the multilayer perceptron structure. The results show great usefulness of the combination of B-spline and ANN modeling techniques to improve response selectivity of a thermally modulated MOS gas sensor.

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