Abstract
The paper describes a new theory and method to measure the error of micro-table 3D motion based on machine vision. Making the centre of three standard small spheres put over micro-table as mark points characterize the pose of table in 3D space. Based on machine vision, through visual tracking of the three standard spheres in 3D space, we can ascertain the pose of table in 3D space and measure the kinematics error of table.
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