Method for extending the depth of focus in X-ray microscopy.

Abstract

Transmission X-ray microscopy (TXM) is a powerful, nondestructive and three-dimensional imaging tool that has been applied in many fields. However, the ability to image large size samples using high-resolution TXM is restricted due to a limited depth of focus (DOF). In this study, a method based on multiple reconstructed slice stacks of an extended sample at different focal positions is developed to extend the DOF of TXM. The simulation and experimental results demonstrate that this novel method effectively and reliably extend the DOF of high-resolution TXM.