Abstract
A method for the algebraic calculation of paraxial design parameters of a telecentric f-theta lens is described. Moreover, a third-order aberration analysis is performed for a telecentric f-theta lens composed of two optical elements. The method can be used to calculate the starting optical design of telecentric f-theta lenses, which can be used, for example, in laser material processing, optical imaging systems, and optical metrology. The initial design parameters then can be used for further optimization in optical design software.
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