Abstract
Non-dissolution preparation method was developed for powder sample analysis by total reflection X-ray fluoresce spectrometry (TXRF). The certified reference materials (CRMs) of silicon nitride powder were suspended in polymer solution and the suspension was spin-coated on substrate. The fine silicon nitride particles dispersed on a few tens of nm thin polymer film were observed by surface profiler and scanning electron microscope (SEM) observation. For spin-coated specimens, TXRF results show not good correlation between the X-ray intensities and standard values for impurity components Cr, Mn, and Fe in silicon nitride powder CRMs. However, taking background ratio can effectively improve the correlation factor by correcting matrix effect and physical characteristics such as surface condition, grain size, and irregular sample shape.
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