Abstract
A low power methane gas sensor with microheater was fabricated by silicon bulk micromachining technology. In order to heat up the sensing layer to operating temperature, a platinum (Pt) micro heater was embedded in the gas sensor. The line width and gap of the microheater was 20 <TEX>${\mu}m$</TEX> and 4.5 <TEX>${\mu}m$</TEX>, respectively. Zinc oxide (ZnO) nanowhisker arrays were grown on a sensor from a ZnO seed layer using a hydrothermal method. A 200 ml aqueous solution of 0.1 mol zinc nitrate hexahydrate, 0.1 mol hexamethylenetetramine, and 0.02 mol polyethylenimine was used for growing ZnO nanowhiskers. Temperature distribution of the sensor was analyzed by infrared thermal camera. The optimum temperature for highest sensitivity was found to be <TEX>$250^{\circ}C$</TEX> although relatively high (64%) sensitivity was obtained even at as low a temperature as <TEX>$150^{\circ}C$</TEX>. The power consumption was 72 mW at <TEX>$250^{\circ}C$</TEX>, and only 25 mW at <TEX>$150^{\circ}C$</TEX>.
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