Abstract
We present the development of a sensitive method for the study of atomization processes via the metastable state population and kinetic energy distributions of sputtered atoms, including atoms on high-lying metastable electronic states. The experimental procedure is based on two-colour two-step resonant photoionization. We report on the population distribution of Ar ion sputtered Ni and Co atoms. The measurements show unexpectedly high populations on metastable states with energies above 1.5 eV. The kinetic energy distributions of Ni atoms on such states support the importance of bandstructure effects in the excitation mechanism of atoms after ion beam sputtering.
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