Abstract
Helium metastable atom density was spatially determined by a modified electrostatic probe in a remote plasma. The probe structure was similar to that of a guard ring probe. Opposite polarity voltages were applied to the inner probe and the guard ring to shield both electrons and ions from the vicinity of the inner probe. Therefore, the inner probe current is due to secondary electrons generated by the de-exciting helium metastable atom flux. The photoelectron current was removed by shielding and orienting the probe 90 degrees to the direction of the plasma-generated photon flux. Helium metastable atom density on the order of 10(7) cm(-3) was measured. Limitations on the use of this technique are revealed by comparisons with simulated metastable distributions.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
